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Таҳқиқот Парвандаи
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Semixlab CVD SiC Coated Graphite Cleaning Case Study
2026-08-24In GaN epitaxy, AlN residue on SiC-coated graphite causes memory effects that impact gas-flow stability and wafer yield. This article explains how professional cleaning removes residue, controls metal contamination, and extends part life without damaging the coating.
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